Influence of Oxygen Composition and Carbon Impurity on Electronic Reliability of HfO2 Thin Films
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چکیده
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
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ژورنال
عنوان ژورنال: Journal of Computer Chemistry, Japan
سال: 2013
ISSN: 1347-1767,1347-3824
DOI: 10.2477/jccj.2012-0018